Rabi Fettig

Title: The Innovations of Rabi Fettig: Pioneering Surface Measurement Technologies

Introduction: Rabi Fettig, an accomplished inventor based in Somerville, Massachusetts, has made significant contributions to the field of surface measurement technology with two notable patents. His work focuses on enhancing the evaluation of substrate surfaces, which is critical in various industries, particularly in semiconductor manufacturing.

Latest Patents: Rabi Fettig's latest patents exemplify his dedication to innovation in surface characterization. The first patent, titled "Localized Substrate Geometry Characterization," introduces a sophisticated system designed to evaluate the metrological characteristics of substrate surfaces. This system leverages an optical substrate measurement technique and a data analysis system that applies feature-specific filters to generate surface-specific metrics. These metrics include a range metric for quantifying maximum and minimum deviations, a deviation metric for measuring the largest point deviation, and a root mean square metric derived from power spectral density.

The second patent, "Curvature-based Edge Bump Quantification," addresses the detection of irregularities in surfaces of various objects, including semiconductor wafers. By analyzing the thickness profile of a surface section, this innovative approach provides essential information on irregularity characteristics such as start position, magnitude, and span, as well as surface slope and height.

Career Highlights: Rabi Fettig currently works at Kla Tencor Corporation, where he continues to develop cutting-edge technologies that advance the field of surface measurement. His expertise and inventions are pivotal for companies that rely on precise surface measurements to ensure product quality and performance.

Collaborations: Throughout his career, Rabi has collaborated closely with esteemed colleagues such as Jaydeep K. Sinha and Sathish Veeraraghavan. Their collective efforts contribute to the innovative spirit at Kla Tencor Corporation, fostering a culture of excellence and continuous improvement.

Conclusion: Rabi Fettig's contributions to surface measurement technology underscore his role as a significant innovator in his field. With two patents to his name, his work not only advances the capabilities of substrate characterization but also sets a benchmark for future innovations in technology. Through his efforts at Kla Tencor Corporation and collaboration with fellow inventors, the future of surface measurement technology looks promising.