Location History:
- Travis, TX (US) (1999)
- Austin, TX (US) (2001)
Company Filing History:
Years Active: 1999-2001
Title: R Michael Greig: Innovator in Real-Time Detection Systems
Introduction
R Michael Greig is a notable inventor based in Austin, TX, recognized for his contributions to real-time detection systems in the semiconductor industry. With a total of 2 patents, Greig has made significant advancements that enhance the efficiency and reliability of wafer fabrication processes.
Latest Patents
One of Greig's latest patents is a "System for enabling the real-time detection of focus-related defects." This innovative system includes a photolithography stepper modified to output z-height focus data for each cell to a fault detection module. After the wafer is exposed, the fault detection module computes statistical data and compares it to predetermined limits. If deviations are detected, the system halts operations and alerts the operator, facilitating immediate corrective actions. Another significant patent is the "System and method for performing real-time data acquisition, process." This invention focuses on detecting faults in wafer fabrication by acquiring real-time process parameter signal data samples. The system employs a computer with a data acquisition device and a fault detector program to analyze data samples, potentially avoiding wafer scrap and improving operational efficiency.
Career Highlights
Greig is currently employed at Advanced Micro Devices Corporation, where he applies his expertise in developing cutting-edge technologies for semiconductor manufacturing. His work has been instrumental in advancing the capabilities of real-time detection systems, which are crucial for maintaining high-quality standards in wafer production.
Collaborations
Throughout his career, Greig has collaborated with talented individuals such as Qingsu Wang and Gerald W Barnett. These partnerships have fostered innovation and contributed to the successful development of his patented technologies.
Conclusion
R Michael Greig's contributions to the field of real-time detection systems have significantly impacted the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in wafer fabrication processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.