Company Filing History:
Years Active: 2014
Title: Quoc Vinh: Innovator in Epitaxial Reactor Technology
Introduction
Quoc Vinh is a notable inventor based in San Leandro, California. He has made significant contributions to the field of semiconductor manufacturing through his innovative designs and technologies. His work primarily focuses on enhancing the efficiency and effectiveness of epitaxial reactors.
Latest Patents
Quoc Vinh holds a patent for a "High throughput multi-wafer epitaxial reactor." This invention enables the simultaneous deposition of thin films on multiple wafers. The reactor design incorporates a wafer sleeve that contains several wafer carrier plates, which are closely spaced to minimize the process volume. During the deposition process, process gases flow preferentially into the interior of the wafer sleeve, which is heated by one or more lamp modules. Additionally, purge gases flow outside the wafer sleeve within the reactor chamber to reduce wall deposition. The sequencing of the illumination of individual lamps can further enhance the linearity of deposition rates within the wafer sleeve. To improve uniformity, the direction of process gas flow can be varied in a cross-flow configuration. This combination of lamp sequencing and cross-flow processing allows for high throughput deposition with excellent film uniformities and efficient use of process gases.
Career Highlights
Quoc Vinh is currently employed at Crystal Solar, Inc., where he continues to develop advanced technologies in the field of solar energy and semiconductor manufacturing. His innovative approach has positioned him as a key player in the industry.
Collaborations
Quoc Vinh has collaborated with notable colleagues such as Visweswaren Sivaramakrishnan and Kedarnath Sangam. These collaborations have contributed to the advancement of technologies in their respective fields.
Conclusion
Quoc Vinh's contributions to the development of epitaxial reactors demonstrate his commitment to innovation in semiconductor technology. His patent and work at Crystal Solar, Inc. highlight his role as a significant inventor in the industry.