Chungcheongnam-do, South Korea

Pyeng-Jae Park


Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 5(Granted Patents)


Company Filing History:


Years Active: 2004

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2 patents (USPTO):Explore Patents

Title: Innovations by Pyeng-Jae Park

Introduction

Pyeng-Jae Park is a notable inventor based in Chungcheongnam-do, South Korea. He has made significant contributions to the field of semiconductor technology, particularly in wafer drying methods and apparatuses. With a total of 2 patents, his work has advanced the efficiency and effectiveness of semiconductor processing.

Latest Patents

One of his latest patents is a "Wafer Drying Method." This method involves several steps, including clearing the substrate by supplying a liquid into a processing bath, injecting first dry gases onto the surface of the supplied liquid, draining the liquid to slowly expose the substrate, and injecting a second dry gas into the chamber while forcibly exhausting gas. Another significant patent is the "Wafer Drying Apparatus," which includes a chamber with a processing bath and cover, a liquid flow system for cleaning the substrate, a gas distributor for drying, and decompression means for exhausting air in the chamber.

Career Highlights

Throughout his career, Pyeng-Jae Park has worked with various companies, including Dns Korea Co., Ltd. and Dns Korea, Ltd. His expertise in semiconductor technology has positioned him as a valuable asset in the industry.

Collaborations

He has collaborated with notable coworkers such as Jeong-Yong Bae and Chang-Ro Yoon, contributing to advancements in their respective fields.

Conclusion

Pyeng-Jae Park's innovations in wafer drying methods and apparatuses have made a significant impact on semiconductor processing. His contributions continue to influence the industry and pave the way for future advancements.

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