The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2004
Filed:
Jun. 26, 2002
Applicant:
Inventors:
Jeong-Yong Bae, ChungCheongNam-do, KR;
Chang-Ro Yoon, ChungCheongNam-do, KR;
Pyeng-Jae Park, ChungCheongNam-do, KR;
Assignee:
DNS Korea, Ltd., ChungecheongNam Do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F26B 1/300 ; F26B 1/306 ; F26B 9/00 ;
U.S. Cl.
CPC ...
F26B 1/300 ; F26B 1/306 ; F26B 9/00 ;
Abstract
An apparatus for drying a semiconductor substrate includes a chamber having a processing bath and a cover, a liquid flow system for supplying a liquid flow into the processing bath so as to clean the substrate and for draining a liquid from the processing bath, a gas distributor for spraying a gas for drying the substrate, and decompression means for exhausting air in the chamber.