Pilsoo Kang

Title: Pilsoo Kang: Innovator in Semiconductor Fabrication

Introduction

Pilsoo Kang is a notable inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding three patents that showcase his innovative approaches to optical proximity correction and mask formation.

Latest Patents

Kang's latest patents include an optical proximity correction method and a method of fabricating a semiconductor device using the same. This method involves performing an optical proximity correction (OPC) operation on a layout and forming a photoresist pattern on a substrate using a photomask that is manufactured with the layout corrected by the OPC operation. The OPC operation includes sectioning the layout into a low-level patch and a high-level patch, performing a first OPC operation on the low-level patch, which generates a first boundary correction pattern of a curvilinear shape on the boundary between the low-level patch and the high-level patch. A second OPC operation is then performed on the high-level patch, which includes a second boundary correction pattern of a curvilinear shape on the boundary. The first and second boundary correction patterns are conformed to each other to generate a conformed boundary correction pattern of a curvilinear shape. Another patent involves a method of forming a mask that includes a curvilinear shape, where preliminary mask data is provided based on a layout. The mask data is corrected through the application of an elliptical function or a B-spline curve, resulting in a mask pattern formed on a mask substrate.

Career Highlights

Pilsoo Kang is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in advancing the methods used in the fabrication of semiconductor devices.

Collaborations

Kang has collaborated with notable coworkers, including Sangwook Kim and Sanghun Kim, contributing to a dynamic and innovative work environment.

Conclusion

Pilsoo Kang's contributions to semiconductor technology through his patents and work at Samsung Electronics Co., Ltd. highlight his role as a leading inventor in the field. His innovative methods in optical proximity correction and mask formation are paving the way for advancements in semiconductor fabrication.