Peter R Southworth

Title: Innovations by Peter R Southworth

Introduction

Peter R Southworth is a notable inventor based in Mission Viejo, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the efficiency and cleanliness of semiconductor wafer transport systems.

Latest Patents

One of his latest patents is a conveyor system designed for automatically transferring a cassette of semiconductor wafers between two clean rooms. This innovative apparatus includes elevators in each room where a load is manually positioned in a load stall. The load is then automatically withdrawn to an elevator, moved to a different elevation, and transferred to an enclosed horizontal conveyor that spans the distance between the clean rooms. The system ensures cleanliness by pressurizing the conveyor and elevator stations with clean air.

Another significant patent is the semiconductor wafer transport system, which automates the transfer of wafer carriers containing semiconductor wafers to various workstations and processing units along a process line. This system features tunnel and track segments that are joined to create a desired path length. A semiconductor carrier rides on a cart within one tunnel, which is magnetically coupled to a motorized cart in a separate tunnel, effectively keeping contaminants away from the wafer carrier. The tunnel enclosing the wafer carrier is purged with nitrogen or filtered air to maintain a contaminant-free environment.

Career Highlights

Peter R Southworth is currently employed at Nacom Industries, Inc., where he continues to innovate in the semiconductor field. His work has been instrumental in developing systems that enhance the efficiency and safety of semiconductor processing.

Collaborations

He collaborates with Gregory R Baxter, contributing to advancements in their shared field of expertise.

Conclusion

Peter R Southworth's contributions to semiconductor technology through his innovative patents demonstrate his commitment to improving industry standards. His work continues to influence the efficiency of semiconductor wafer transport systems, making a significant impact in the field.