Company Filing History:
Years Active: 2001
Title: **Innovator Spotlight: Peter M Kopalidis**
Introduction
Peter M Kopalidis is a noteworthy inventor based in Arlington, MA. With two patents credited to his name, he has made significant contributions to the technology of ion implantation and surface cleaning. His innovative methods enhance the performance and reliability of semiconductor fabrication processes.
Latest Patents
One of Kopalidis's latest inventions is a patent for a "System and method for cleaning silicon-coated surfaces in an ion implanter." This invention presents a unique approach to controllably stripping silicon from surfaces. The system integrates a source of reactive gas, such as fluorine, and a radio frequency plasma source that converts the gas to a plasma, directing it to the silicon-coated surface for effective cleaning. This method proves beneficial in removing contaminant-laden layers of silicon from components in ion implanters.
Another critical patent by Kopalidis is titled "System and method for cleaning contaminated surfaces in an ion implanter." This invention focuses on generating an ion beam with a reactive species component and directing it toward contaminated surfaces. By neutralizing the ion beam with an additional gas like xenon and allowing reactive atoms to interact with contaminants, this technology efficiently cleans surfaces within vacuum chambers, thus improving the overall operation of ion implantation equipment.
Career Highlights
Peter M Kopalidis is currently employed at Axcelis Technologies, Inc., a company recognized for its innovative solutions in the semiconductor sector. His work on cleaning systems for ion implanters showcases his dedication to advancing the industry and improving manufacturing efficiency.
Collaborations
Throughout his career, Kopalidis has collaborated with notable colleagues including James D Bernstein and Brian S Freer. Their combined expertise in semiconductor technologies has facilitated the development of effective cleaning methodologies within ion implanters.
Conclusion
Peter M Kopalidis stands out as an influential inventor in the realm of semiconductor technology. His patents reflect a commitment to innovation that directly impacts the efficiency of ion implantation processes. With a strong foundation in research and development at Axcelis Technologies, Kopalidis continues to pave the way for advancements in this critical field.