Company Filing History:
Years Active: 2014-2017
Title: Innovations by Peter M Kopalidis
Introduction
Peter M Kopalidis is an accomplished inventor based in Fremont, CA. He has made significant contributions to the field of ion implantation technology, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of ion sources and measurement techniques.
Latest Patents
One of his latest patents is titled "Ion source of an ion implanter." This invention utilizes at least one induction coil to generate an alternating magnetic field, which couples radio frequency (rf) or very high frequency (VHF) power into a plasma within a vessel. The design includes an excitation coil positioned outside the vessel, which is elongated parallel to the extraction slit. This configuration helps to block capacitive coupling to the plasma and collect any rf/VHF current that may be coupled into it. Another notable patent is the "Apparatus and method for measuring ion beam current." This patent discloses techniques for measuring low energy ion beam current using a planar Faraday cup and a voltage assembly, allowing for precise measurement of ion beam currents.
Career Highlights
Peter M Kopalidis works at Advanced Ion Beam Technology, Inc., where he continues to innovate in the field of ion beam technology. His expertise has led to advancements that are crucial for various applications in semiconductor manufacturing and materials science.
Collaborations
He collaborates with notable colleagues such as Zhimin Wan and Stephen E Savas, contributing to a dynamic research environment that fosters innovation.
Conclusion
Peter M Kopalidis is a prominent figure in the field of ion implantation technology, with a focus on developing advanced solutions for ion sources and measurement techniques. His contributions are vital to the ongoing evolution of this technology.