Company Filing History:
Years Active: 2003
Title: The Innovations of Peter Cornelis Görts
Introduction
Peter Cornelis Görts is a notable inventor based in Utrecht, Netherlands. He has made significant contributions to the field of multilayer systems, particularly in enhancing their durability and reflectivity. His work is crucial for applications in semiconductor lithography, especially in the extreme ultraviolet wavelength range.
Latest Patents
Peter Cornelis Görts holds a patent for a multilayer system with a protective layer system and a production method. This innovative multilayer system addresses the issues of contamination and oxidation that can occur during storage and operation. The invention ensures a long life with consistently high reflectivity, making it particularly suitable for use in semiconductor lithography. The protective layers are made from materials such as ruthenium, aluminum oxide, silicon carbide, molybdenum carbide, carbon, titanium nitride, or titanium dioxide. The production method involves direct, ion-beam-supported growth of the protective layer, ensuring that the multilayer systems remain resistant to contamination and oxidation.
Career Highlights
Peter Cornelis Görts is associated with Carl Zeiss Stiftung, where he continues to innovate in the field of multilayer systems. His work has been instrumental in advancing technologies that require high reflectivity and durability.
Collaborations
Peter has collaborated with notable colleagues such as Frederik Bijkerk and Eric Louis, contributing to the development of advanced multilayer systems.
Conclusion
Peter Cornelis Görts is a distinguished inventor whose work in multilayer systems has significantly impacted the field of semiconductor lithography. His innovative approaches ensure that these systems maintain high reflectivity and durability, paving the way for advancements in technology.