Peter Byung H Han

Title: Innovations of Peter Byung H Han

Introduction

Peter Byung H Han is a notable inventor based in Suwon-si, South Korea. He has made significant contributions to the field of plasma processing equipment, holding a total of 3 patents. His work is primarily associated with Samsung Electronics Co., Ltd., where he continues to innovate and develop advanced technologies.

Latest Patents

One of his latest patents involves plasma processing equipment designed to enhance the efficiency of semiconductor manufacturing. This equipment features a chuck stage that supports a wafer, incorporating a lower electrode and an upper electrode. An AC power supply applies first to third signals with varying frequencies to either the upper or lower electrode. Additionally, a dielectric ring surrounds the chuck stage, and an edge electrode is located within this ring. The resonance circuit connected to the edge electrode includes a filter circuit that allows only the third signal to pass, along with a series resonance circuit that consists of a first coil and a first variable capacitor grounded in series.

Career Highlights

Throughout his career, Peter has focused on developing innovative solutions that address the challenges in plasma processing technology. His expertise has led to advancements that improve the performance and reliability of semiconductor manufacturing processes.

Collaborations

Peter has collaborated with several talented individuals in his field, including Seung Bo Shim and Doug Yong Sung. Their combined efforts have contributed to the success of various projects at Samsung Electronics Co., Ltd.

Conclusion

Peter Byung H Han is a distinguished inventor whose work in plasma processing equipment has made a significant impact on the semiconductor industry. His patents reflect his commitment to innovation and excellence in technology.