Company Filing History:
Years Active: 2010
Title: Innovations by Peng Yu in Optical Proximity Correction
Introduction
Peng Yu is an accomplished inventor based in Austin, TX (US). He has made significant contributions to the field of optical proximity correction, which is crucial in the manufacturing of integrated circuits. His innovative approach addresses process variations, enhancing the precision of semiconductor fabrication.
Latest Patents
Peng Yu holds a patent titled "Method and system for performing optical proximity correction with process variations considerations." This patent describes a method for performing optical proximity correction by initially determining the maximum aerial gradient direction for a control point associated with an edge. The process involves calculating a variational edge placement error along the maximum aerial image intensity gradient direction of the control point. A critical aspect of this method is determining whether the calculated value is equal to or greater than a manufacturing grid. If it meets this criterion, the edge is adjusted accordingly.
Career Highlights
Peng Yu is affiliated with the University of Texas System, where he continues to advance research in optical proximity correction. His work is instrumental in improving the accuracy and efficiency of semiconductor manufacturing processes.
Collaborations
Peng Yu collaborates with Zhigang Pan, a fellow researcher, to further explore innovations in optical proximity correction and related technologies.
Conclusion
Peng Yu's contributions to optical proximity correction demonstrate his expertise and commitment to advancing semiconductor technology. His innovative methods are paving the way for more precise manufacturing processes in the industry.