This inventor holds 1 USPTO granted patent and 5 published patent applications. Top assignee: Taiwan Semiconductor Manufacturing Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Pei-Yi Su: Semiconductor Contamination-Handling Innovation.
Introduction
Pei-Yi Su is an inventor associated with Taichung, Taiwan, and Taiwan Semiconductor Manufacturing Co., Ltd. The available information identifies 1 patent associated with Su.
Latest Patents
Su’s patent, “Contamination Handling for Semiconductor Apparatus,” describes a lithography apparatus with a photoresist coating unit that performs coating processes on a substrate. A detection unit determines the level of contamination adhering to the apparatus’s sidewall, and a controller adjusts apparatus operations by comparing that level with a baseline cleanliness requirement. This approach links contamination monitoring with operational control in semiconductor manufacturing equipment.
Career Highlights
The patent reflects work focused on contamination detection and process control for lithography equipment. These capabilities can help semiconductor manufacturers monitor cleanliness conditions and adjust equipment operations accordingly.
Collaborations
The provided information lists Fu-Chun Hsieh and Chih-Che Lin as Su’s coworkers. It does not specify their roles in the patent or describe particular collaborative contributions.
Conclusion
Pei-Yi Su’s identified patent addresses contamination monitoring and responsive control in lithography apparatus, highlighting an innovation relevant to semiconductor manufacturing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile