Company Filing History:
Years Active: 2018-2020
Title: The Innovative Contributions of Paul Robertson in Semiconductor Technology
Introduction
Paul Robertson, an accomplished inventor based in Fremont, California, has made significant strides in the field of semiconductor technology. With two patents to his name, Robertson's work reflects a deep understanding of power switching systems and their applications within plasma processing chambers.
Latest Patents
One of Paul Robertson's latest inventions is a power switching system for electrostatic chucks (ESC) featuring an array of thermal control elements. This innovative semiconductor substrate support facilitates the precise tuning of spatial temperature profiles on semiconductor substrates. The heater array is meticulously designed, incorporating multiple thermal control elements that define distinct heater zones. These zones are strategically powered by multiple power supply lines and return lines, ensuring optimal temperature management. Additionally, the integration of a power distribution circuit, which connects to each power supply and return line, allows for advanced control over the heating process. The switching device embedded in the power distribution circuit enables time-averaged power delivery to each heater zone through time divisional multiplexing of several switches, showcasing Robertson's ability to solve complex challenges in semiconductor manufacturing.
Career Highlights
Robertson is currently affiliated with Lam Research Corporation, a prominent player in the semiconductor manufacturing equipment industry. His role at the company has been pivotal in developing advanced technologies that support the efficiency and effectiveness of semiconductor processing.
Collaborations
Throughout his career, Paul has collaborated with notable professionals in the field, including colleagues Keith William Gaff and Tom Anderson. These partnerships have fostered an environment of creativity and innovation, further propelling advancements in semiconductor technology.
Conclusion
As an inventor, Paul Robertson exemplifies the entrepreneurial spirit and technical prowess needed to drive innovation in the semiconductor industry. His contributions through patents not only enhance manufacturing processes but also pave the way for future technological advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.