This inventor holds 1 USPTO granted patent. Top assignee: Varian Associates, Inc.. Active years: 1995.
Company Filing History:
Years Active: 1995
Title: The Innovative Contributions of Patrick O. Miller
Introduction
Patrick O. Miller is a notable inventor based in Mountain View, California. He has made significant contributions to the field of sputtering technology, particularly through his innovative patent. His work is characterized by a focus on improving the efficiency and effectiveness of sputtering processes.
Latest Patents
Patrick O. Miller holds a patent titled "Method for controlling a collimated sputtering source." This invention provides a method for automatically controlling a collimated sputtering source that is manageable by a computer. The method compensates for the build-up of sputtered material on the collimator. It involves providing software that includes a formula to calculate a multiplier based on the age of the collimator. The process includes sequentially depositing film on a series of substrates using the sputtering source, monitoring the collimator's age, and using the software to periodically adjust a controllable sputtering parameter. This adjustment ensures that the properties of the film deposited remain consistent across the substrates, even as sputtered material accumulates on the collimator.
Career Highlights
Patrick O. Miller is associated with Varian Associates, Inc., where he has contributed to advancements in sputtering technology. His work has been instrumental in enhancing the performance of sputtering systems, making them more reliable and efficient.
Collaborations
Some of his notable coworkers include Geri M. Actor and Stephen M. Higa. Their collaborative efforts have likely contributed to the innovative environment at Varian Associates, Inc.
Conclusion
Patrick O. Miller's contributions to sputtering technology through his patent demonstrate his commitment to innovation in the field. His work continues to influence the industry, ensuring that sputtering processes are more effective and consistent.
