This inventor holds 3 USPTO granted patents. Top assignee: International Business Machines Corporation. Active years: 1997-1998.
Company Filing History:
Years Active: 1997-1998
Title: The Innovations of Patrick J Couillard
Introduction
Patrick J Couillard is a notable inventor based in Jericho, Vermont, USA. He has made significant contributions to the field of lithography, holding a total of 3 patents. His work focuses on improving print bias and overlay targets, which are essential in the lithographic process.
Latest Patents
One of his latest patents is titled "Lithographic print bias/overlay target and applied metrology." This invention involves imaging a print bias target in a single layer of light-sensitive material. The print bias target consists of a pair of concentric geometric shapes, with multiple target regions that form isolated edges. Each target region features a different image structure compared to its adjacent regions. The positioning of isolated edges in the print bias target is determined relative to corresponding edges in the design image. This innovation allows for the determination of focus and exposure settings in lithographic systems to minimize print bias. Additionally, it aids in identifying imaging aberrations such as lithographic astigmatism and coma. The method also includes determining the slope of an imaging profile and overlay by analyzing the relationship between the print bias target and prior level images.
Career Highlights
Patrick J Couillard is currently employed at International Business Machines Corporation, commonly known as IBM. His role at IBM has allowed him to further develop his expertise in lithography and contribute to cutting-edge technologies in the industry.
Collaborations
One of his notable coworkers is Roger Lawrence Barr, with whom he has likely collaborated on various projects within the company.
Conclusion
Patrick J Couillard's innovative work in lithography and his contributions to the field through his patents highlight his importance as an inventor. His advancements in print bias and overlay targets continue to influence the industry positively.