Patrick D Kinney is a notable inventor based in Santa Clara, CA. He has made significant contributions to the field of optical inspection technology. His innovative approach has led to the development of a patented optical inspection module that enhances the detection of particles and defects on substrates.

Latest Patents

Patrick D Kinney holds a patent for an "Optical inspection module and method for detecting particles and defects." This invention involves an optical inspection module designed to detect defects on the active surface of a substrate within an integrated process tool system. The module comprises an enclosure, a substrate holder, a light source, a light beam path, a lens, and a photodetector array. The light source features a light beam port, and the light beam path is engineered to illuminate the entire active surface at a grazing angle of incidence. The lens collects non-secularly reflected light scattered by any defects, while the photodetector array consists of multiple pixels that correspond to areas on the active surface, collectively forming a comprehensive field of view.

Career Highlights

Throughout his career, Patrick has worked with several companies, including Microtherm LLC and Nanometrics Inc. His experience in these organizations has allowed him to refine his skills and contribute to advancements in optical inspection technologies.

Collaborations

Patrick has collaborated with various professionals in his field, including Nagaraja P Rao. These partnerships have fostered innovation and the sharing of ideas, further enhancing the development of his patented technologies.

Conclusion

Patrick D Kinney is a distinguished inventor whose work in optical inspection technology has made a significant impact. His patented innovations continue to advance the field and improve the detection of defects in substrates.