Tracy, CA, United States of America

Patrick Chung

USPTO Granted Patents = 3 

 

Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 6(Granted Patents)


Location History:

  • Fremont, CA (US) (2013)
  • Tracy, CA (US) (2012 - 2020)

Company Filing History:


Years Active: 2012-2020

where 'Filed Patents' based on already Granted Patents

3 patents (USPTO):

Title: The Innovative Mind of Patrick Chung

Introduction

Patrick Chung, an inventive engineer based in Tracy, California, has made significant contributions to the field of semiconductor technology. With a total of three patents to his name, Chung's work demonstrates his commitment to advancing industry practices through innovative engineering solutions.

Latest Patents

Patrick Chung's latest patents reflect his expertise and dedication to improving semiconductor manufacturing processes. One of his notable inventions is an **Edge Ring Assembly for Improving Feature Profile Tilting at the Extreme Edge of Wafer**. This invention features an upper edge ring designed to surround an electrostatic chuck (ESC). It includes an annular step that defines a shelf lower than the ESC's top surface, optimizing the assembly's efficiency. Additionally, Chung has developed a method for **Depositing Bevel Protective Film**, utilizing localized plasma technology to safeguard the bevel edge of wafers during plasma chamber operations. This method focuses on precise adjustments of electrode gaps and maintaining optimal temperatures for effective film deposition.

Career Highlights

Chung's professional journey has led him to work with Lam Research Corporation, a prominent player in the semiconductor equipment industry. His role within the company emphasizes his contributions to developing cutting-edge technologies that enhance semiconductor manufacturing.

Collaborations

Throughout his career, Patrick Chung has collaborated with talented individuals such as Tamarak Pandhumsoporn and Neungho Shin. These collaborations have enabled him to contribute to innovative projects that push the boundaries of semiconductor technology.

Conclusion

With a strong portfolio of patents and a career dedicated to innovation, Patrick Chung exemplifies the spirit of creativity and progress within the semiconductor industry. His contributions not only enhance current technologies but also pave the way for future advancements in the field.

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