Oskar U Vierny

Title: Oskar U Vierny: Innovator in Wafer Handling Technology

Introduction

Oskar U Vierny is a notable inventor based in Palo Alto, CA, who has made significant contributions to the field of semiconductor processing. With a total of 2 patents, his work focuses on innovative methods for handling wafers within vacuum chambers, enhancing the efficiency and effectiveness of semiconductor manufacturing.

Latest Patents

Oskar's latest patents include groundbreaking technologies that improve wafer handling. One of his patents describes a method for wafer handling within a vacuum chamber, which involves a structure and method for processing wafers in a face-down configuration. This invention utilizes a robot insertion blade to support the wafer in a recess with conically sloping holding surfaces, ensuring minimal contact with the wafer's periphery. The process allows for the wafer to be raised adjacent to a susceptor bottom surface, utilizing differential pressure to support the wafer during processing.

Another patent focuses on a controlled environment enclosure and mechanical interface. This method enables the transfer of articles, such as semiconductor wafers, between two chambers without exposing them to particulate-producing sliding contact. The invention includes a carrier for a vertically spaced array of articles, which can be opened and released without producing sliding contact, ensuring the integrity of the wafers during the transfer process.

Career Highlights

Oskar U Vierny is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials has allowed him to develop and refine his innovative ideas, contributing to advancements in wafer processing technology.

Collaborations

Throughout his career, Oskar has collaborated with esteemed colleagues, including Philip M Salzman and Sasson Roger Somekh. These collaborations have fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Oskar U Vierny's contributions to wafer handling technology have positioned him as a key figure in the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in semiconductor processing, showcasing the importance of innovation in this critical field.