This inventor holds 1 USPTO granted patent. Top assignee: United States of America as Represented by the Secretary of the Air Force. Active years: 1995.
Company Filing History:
Years Active: 1995
Title: Innovations of Oliver D Patterson
Introduction
Oliver D Patterson is an accomplished inventor based in Beavercreek, OH (US). He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent related to molecular beam epitaxy.
Latest Patents
Patterson holds a patent for a "Hierarchical control system for molecular beam epitaxy." This multi-featured control system enhances the manufacturing capability of the thin-film semiconductor growth process. It improves the repeatability and accuracy of the process, reduces the manpower requirements to operate molecular beam epitaxy (MBE), and enhances the MBE environment for scientific investigation. The system consists of three levels of feedback control. The first level enhances the precision and tracking of process variables, such as flux and substrate temperature. The second level includes an expert system that utilizes sensors to monitor the product's status, allowing for real-time adjustments to the process plan to achieve the desired qualities. The third level features a continuously evolving neural network model of the process, which recommends recipes and command inputs to meet specific goals. This level is particularly beneficial during the development of new materials. All three levels require models of the process that are updated during automatic process identification experiments.
Career Highlights
Patterson's work is conducted under the auspices of the United States of America as represented by the Secretary of the Air Force. His innovative contributions have significantly advanced the field of semiconductor manufacturing.
Collaborations
Patterson has collaborated with notable colleagues, including Jeffrey J Heyob and Steven R LeClair, who have contributed to his research and development efforts.
Conclusion
Oliver D Patterson's innovative work in the field of molecular beam epitaxy exemplifies the impact of advanced control systems on semiconductor manufacturing. His contributions continue to influence the industry and enhance scientific research capabilities.