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Oakland, CA, United States of America

Ole Waldmann

This inventor holds 7 USPTO granted patents. Top assignee: Lam Research Corporation. Active years: 2016-2019.

USPTO Granted Patents = 7

% Patents Active = 100.0

Average Co-Inventor Count = 3.5

ph-index = 2

Forward Citations = 11(Granted Patents)

Company Filing History:

Lam Research Corporation

Years Active: 2016-2019

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10437236 - Method of determining thermal stability of a substrate support assembly (2019-10-08),

2. 10096506 - Reducing temperature transition in a substrate support (2018-10-09),

3. 9922855 - Method for reducing temperature transition in an electrostatic chuck (2018-03-20),

4. 9779974 - System and method for reducing temperature transition in an electrostatic chuck (2017-10-03),

5. 9716022 - Method of determining thermal stability of a substrate support assembly (2017-07-25),

6. 9543171 - Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element (2017-01-10),

7. 9435692 - Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output (2016-09-06),

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Profile summary based on public USPTO records.

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