Norichika Yamagishi

Title: Norichika Yamagishi: Innovator in Semiconductor Technology

Introduction

Norichika Yamagishi is a prominent inventor based in Toyama, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of three patents. His work focuses on innovative apparatuses and methods that enhance the efficiency and effectiveness of substrate processing.

Latest Patents

Yamagishi's latest patents include a substrate processing apparatus, a substrate holding apparatus, and a method of manufacturing semiconductor devices. One of his notable inventions is a technique that features a process chamber designed to process at least one substrate. This apparatus includes a microwave generator that generates microwaves, a substrate holder for loading and holding the substrate, and a rotator with an output shaft that supports the substrate holder. The input shaft is positioned off-centered relative to the output shaft, which enhances the processing capabilities.

Another significant patent involves a substrate processing apparatus that comprises a process housing with a process chamber for substrate processing. This invention also includes a transfer housing adjacent to the process housing, facilitating the transfer of substrates between the process chamber and the transfer chamber. The apparatus is equipped with a microwave generator that transmits microwaves into the process chamber, along with a loading/unloading port for substrate transfer. Additionally, it features a detection sensor that monitors microwave leakage while the loading/unloading port remains closed.

Career Highlights

Throughout his career, Norichika Yamagishi has worked with notable companies such as Kokusai Electric Corporation and Hitachi Kokusai Electric Inc. His experience in these organizations has allowed him to develop and refine his innovative ideas in semiconductor technology.

Collaborations

Yamagishi has collaborated with esteemed colleagues, including Makoto Hirano and Akihiro Yoshida. These partnerships have contributed to the advancement of his research and the successful development of his patented technologies.

Conclusion

Norichika Yamagishi is a distinguished inventor whose work in semiconductor technology has led to several innovative patents. His contributions continue to impact the industry, showcasing the importance of creativity and collaboration in technological advancements.