Nora Arellano

Title: Nora Arellano: Innovator in Electrostatic Chuck Technology

Introduction

Nora Arellano is a prominent inventor based in Macomb, MI (US). She has made significant contributions to the field of electrostatic chuck technology. Her innovative work has led to the development of a unique patent that enhances the efficiency of semiconductor manufacturing processes.

Latest Patents

Nora Arellano holds a patent for a detachable electrostatic chuck. This electrostatic chuck is designed to attach to a pedestal in a process chamber. The chuck features an electrostatic puck that comprises a ceramic body with an embedded electrode. The ceramic body has a substrate support surface with an annular periphery. Additionally, the chuck includes a base plate below the electrostatic puck, which is a composite of ceramic material and metal. The base plate has an annular flange extending beyond the periphery of the ceramic body. This design allows for effective support by a support pedestal that has a housing and an annular ledge extending outwardly to attach to the annular flange of the base plate. Furthermore, a heat transfer plate with an embedded heat transfer fluid channel can also be integrated into the system.

Career Highlights

Nora Arellano is currently employed at Applied Materials, Inc., where she continues to innovate in the field of semiconductor technology. Her work has been instrumental in advancing the capabilities of electrostatic chucks, which are critical components in the manufacturing of semiconductor devices.

Collaborations

Throughout her career, Nora has collaborated with notable colleagues, including Karl M Brown and Semyon Sherstinsky. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Nora Arellano is a trailblazer in the field of electrostatic chuck technology, with her patent showcasing her innovative spirit and technical expertise. Her contributions continue to impact the semiconductor industry positively.