The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2010
Filed:
Mar. 31, 2004
Karl Brown, Mountain View, CA (US);
Nora Arellano, Macomb, MI (US);
Semyon Sherstinsky, San Francisco, CA (US);
Allen Lau, Cupertino, CA (US);
Cheng-hsiung Tsai, Cupertino, CA (US);
Vineet Mehta, Sunnyvale, CA (US);
Steve Sansoni, Livemore, CA (US);
Wei W. Wang, Santa Clara, CA (US);
Karl Brown, Mountain View, CA (US);
Nora Arellano, Macomb, MI (US);
Semyon Sherstinsky, San Francisco, CA (US);
Allen Lau, Cupertino, CA (US);
Cheng-Hsiung Tsai, Cupertino, CA (US);
Vineet Mehta, Sunnyvale, CA (US);
Steve Sansoni, Livemore, CA (US);
Wei W. Wang, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An electrostatic chuck is capable of attachment to a pedestal in a process chamber. The chuck has an electrostatic puck comprises a ceramic body with an embedded electrode. The ceramic body has a substrate support surface with an annular periphery. The chuck also has a base plate below the electrostatic puck that is a composite of a ceramic material and a metal. The base plate has an annular flange extending beyond the periphery of the ceramic body. The base plate and electrostatic puck can be supported by a support pedestal having a housing and an annular ledge that extends outwardly from the housing to attach to the annular flange of the base plate. A heat transfer plate having an embedded heat transfer fluid channel can also be provided.