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Tochigi-ken, Japan

Nobuyoshi Deguchi

USPTO Granted Patents = 5

Average Co-Inventor Count = 2.0

ph-index = 4

Forward Citations = 91(Granted Patents)

Location History:

Yamatoshi, JP (1988)
Tochigi, JP (2003)
Tochigi-ken, JP (2002 - 2005)

Company Filing History:

5 out of 90,809

Canon Kabushiki Kaisha

Years Active: 1988-2005

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6856404 - Scanning exposure method and apparatus, and device manufacturing method using the same (2005-02-15),

2. 6638672 - Exposure apparatus, coating/developing apparatus, method of transferring a substrate, method of producing a device, semiconductor production factory, and method of maintaining an exposure apparatus (2003-10-28),

3. 6608666 - Reference plate, exposure apparatus, device manufacturing system, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method (2003-08-19),

4. 6493062 - Driving apparatus and exposure apparatus (2002-12-10),

5. 4747608 - Wafer chuck (1988-05-31),

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