Company Filing History:
Years Active: 2019
Title: Nobuko Matsumoto: Innovator in Pellicle Technology
Introduction
Nobuko Matsumoto is a prominent inventor based in Kyoto, Japan. She has made significant contributions to the field of pellicle technology, particularly in the production of pellicle films used in advanced manufacturing processes.
Latest Patents
Matsumoto holds a patent for a method related to pellicle film, pellicle frame, and the production of these components. Her patent addresses the issue of contamination during the production of pellicles, which can occur due to dust and other particles. The invention provides a method for producing a pellicle for extreme ultraviolet (EUV) lithography that minimizes the risk of dust attachment during various production processes. This innovative approach includes forming a pellicle film on a substrate, trimming the substrate, and removing particles from the pellicle film's surface before any part of the substrate is removed.
Career Highlights
Matsumoto is currently employed at Mitsui Chemicals, Inc., where she continues to develop and refine her innovative ideas. Her work has been instrumental in advancing the technology used in semiconductor manufacturing.
Collaborations
Matsumoto collaborates with notable colleagues, including Atsushi Okubo and Tsuneaki Biyajima, who contribute to her research and development efforts.
Conclusion
Nobuko Matsumoto's contributions to pellicle technology highlight her role as an influential inventor in the field. Her innovative methods for producing pellicles are paving the way for advancements in semiconductor manufacturing.