Nireekshan Reddy

Title: Nireekshan Reddy: Innovator in Overlay Metrology

Introduction

Nireekshan Reddy is a notable inventor based in Milpitas, California. He has made significant contributions to the field of overlay metrology, particularly through his innovative patent. His work is essential for advancements in precision measurement technologies.

Latest Patents

Nireekshan Reddy holds a patent for a "System and method for overlay metrology using a phase mask." This patent describes an overlay metrology system that includes a controller with one or more processors. The processors are designed to execute program instructions that allow them to receive pupil images of collected light from an overlay target. They also receive a known phase distribution to be introduced to an illumination beam directed at the overlay target. The processors model an intensity function that relates the pupil images, the known phase distribution, and one or more decentered shift parameters of the overlay target's structures. They fit the pupil images to the intensity function based on the known phase distribution and the decentered shift parameters, ultimately generating an overlay measurement based on the fit.

Career Highlights

Nireekshan Reddy is currently employed at Kla Corporation, where he applies his expertise in overlay metrology. His work at Kla Corporation has positioned him as a key player in the development of advanced measurement systems.

Collaborations

Nireekshan collaborates with talented coworkers, including Iftach Galon and Itay Gdor. Their combined efforts contribute to the innovative environment at Kla Corporation.

Conclusion

Nireekshan Reddy's contributions to overlay metrology through his patent and work at Kla Corporation highlight his role as an influential inventor in the field. His innovative approaches continue to drive advancements in precision measurement technologies.