This inventor holds 4 USPTO granted patents and 5 published patent applications. Top assignee: Lam Research Corporation. Active years: 2020-2023.
USPTO Granted Patents = 4 (Patent Applications = 5)
% Patents Active = 100.0
Average Co-Inventor Count = 3.0
ph-index = 3
Forward Citations = 21(Granted Patents)
Location History:
- Tualatin, OR (US) (2020)
- Beaverton, OR (US) (2022 - 2023)
Company Filing History:
Years Active: 2020-2023
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4 patents (USPTO):Explore Patents
1. 11851760 - PECVD deposition system for deposition on selective side of the substrate (2023-12-26),
2. 11725283 - PECVD deposition system for deposition on selective side of the substrate (2023-08-15),
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5 patents pending:
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1 patent pending (EPO):
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