Nicholas Michael Bergantz

Title: Innovations of Nicholas Michael Bergantz

Introduction

Nicholas Michael Bergantz is a prominent inventor based in Santa Clara, California. He holds a total of 16 patents, showcasing his significant contributions to the field of electronics processing systems. His innovative work has made a notable impact in the industry.

Latest Patents

One of his latest patents involves the calibration of an electronics processing system. In this invention, a first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. The controller determines, using a sensor, a first offset amount between the center of the calibration object and the pocket center of the second robot arm. Furthermore, the controller calculates a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. This characteristic error value is then used by either the first or second robot arm to compensate for misalignment during the transfer of objects.

Another notable patent is for an enclosure system shelf that includes alignment features. This invention consists of a set of one or more shelves configured to be disposed within an enclosure system of a substrate processing system. The shelves include first upper surfaces disposed substantially in a first plane, carrier alignment features to align a carrier on the first upper surfaces, and second