Company Filing History:
Years Active: 2016
**Title: Nell Benjamin: Innovating Semiconductor Processing Technologies**
Introduction
Nell Benjamin, an accomplished inventor based in East Palo Alto, California, has made significant strides in the field of semiconductor processing. With a patented invention that enhances the functionality of heating plates, she is contributing to the technical advancements in this vital industry.
Latest Patents
Nell Benjamin holds a patent titled “Multiplexed heater array using AC drive for semiconductor processing.” This innovative heating plate is designed for substrate support assemblies in semiconductor plasma processing apparatuses. It comprises multiple independently controllable planar heater zones arranged in a scalable multiplexing layout, alongside the necessary electronics for independent control and power. The heating plate integrates an electrostatic clamping electrode and a temperature-controlled base plate.
Her manufacturing methods involve the bonding of ceramic or polymer sheets that contain planar heater zones, branch transmission lines, common transmission lines, and vias. Notably, this heating plate can be driven by AC current or direct current phase alternating power, effectively minimizing DC magnetic field effects above the substrate support assembly and reducing plasma non-uniformity caused by DC magnetic fields.
Career Highlights
Nell is currently working with Lam Research Corporation, where she applies her expertise in semiconductor processing to drive innovation. Her work has had a lasting impact on the operational efficiency and efficacy of semiconductor manufacturing techniques.
Collaborations
In her professional journey, Nell collaborates with fellow engineer John Pease at Lam Research Corporation. Their teamwork is essential in fostering advancements in the technology and processes employed in the company.
Conclusion
Nell Benjamin’s contributions to semiconductor processing through her patented innovations showcase her role as a significant inventor in the field. Her ongoing work at Lam Research Corporation reflects her commitment to pushing the boundaries of technology, making her a notable figure in this competitive industry.