Nathaniel Moore

Title: Nathaniel Moore: Innovator in Electrostatic Chuck Technology

Introduction

Nathaniel Moore is a notable inventor based in Santa Clara, CA. He has made significant contributions to the field of electrostatic chuck technology, particularly with his innovative methods for improving backside particle performance.

Latest Patents

Moore holds a patent titled "Soft-chucking scheme for improved backside particle performance." This patent includes methods of chucking and de-chucking a substrate. The method involves applying a first voltage to a chucking electrode in the electrostatic chuck during a chucking time interval. It also includes supplying an inert gas at a first pressure to the backside of the substrate during this interval. After the chucking time interval, a second voltage, which is higher than the first, is applied to the chucking electrode. Additionally, the inert gas is supplied at a second pressure, which is also higher than the first pressure.

Career Highlights

Nathaniel Moore is currently employed at Applied Materials, Inc., where he continues to develop and refine technologies that enhance manufacturing processes. His work has been instrumental in advancing the capabilities of electrostatic chucks in various applications.

Collaborations

Moore collaborates with talented individuals such as Tony Jefferson Gnanaprakasa and Alvaro Garcia, contributing to a dynamic team focused on innovation and excellence in technology.

Conclusion

Nathaniel Moore's contributions to electrostatic chuck technology exemplify the impact of innovative thinking in the field of manufacturing. His patent and ongoing work at Applied Materials, Inc. highlight his commitment to advancing technology for improved performance.