Yokohama, Japan

Naoya Kida


Average Co-Inventor Count = 3.9

ph-index = 2

Forward Citations = 514(Granted Patents)


Company Filing History:


Years Active: 2009-2025

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5 patents (USPTO):Explore Patents

Title: Naoya Kida: Innovator in Substrate Temperature Control

Introduction

Naoya Kida is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of substrate temperature control, holding a total of 5 patents. His innovative work has implications for various manufacturing processes, particularly in the semiconductor industry.

Latest Patents

One of Kida's latest patents is an "Apparatus and method for controlling a substrate temperature." This invention features a stage that includes a shaft, a first supporting plate over the shaft, a heater arranged in a trench formed in the first supporting plate, and a gas-supplying tube designed to blow gas to the first supporting plate. The design ensures that the gas is not released into the chamber where the stage is located, enhancing the efficiency of temperature control.

Another notable patent is the "Stage and manufacturing method thereof." This invention describes a stage that consists of a base material with a step portion and an insulating film. The step portion has a first surface recessed from the top surface of the base material and a second surface recessed from the side surface. The insulating film comprises multiple layers that are alternately stacked, optimizing the performance of the stage in various applications.

Career Highlights

Naoya Kida is currently employed at Nhk Spring Co., Ltd., where he continues to develop innovative solutions in his field. His work has garnered attention for its practical applications and technical advancements.

Collaborations

Kida has collaborated with notable colleagues, including Jun Futakuchiya and Toshihiro Tachikawa. These partnerships have contributed to the development of cutting-edge technologies and have fostered a collaborative environment for innovation.

Conclusion

Naoya Kida's contributions to substrate temperature control through his patents demonstrate his expertise and commitment to innovation. His work at Nhk Spring Co., Ltd. and collaborations with fellow inventors highlight the importance of teamwork in advancing technology.

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