Company Filing History:
Years Active: 2009-2025
Title: Naoya Kida: Innovator in Substrate Temperature Control
Introduction
Naoya Kida is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of substrate temperature control, holding a total of 5 patents. His innovative work has implications for various manufacturing processes, particularly in the semiconductor industry.
Latest Patents
One of Kida's latest patents is an "Apparatus and method for controlling a substrate temperature." This invention features a stage that includes a shaft, a first supporting plate over the shaft, a heater arranged in a trench formed in the first supporting plate, and a gas-supplying tube designed to blow gas to the first supporting plate. The design ensures that the gas is not released into the chamber where the stage is located, enhancing the efficiency of temperature control.
Another notable patent is the "Stage and manufacturing method thereof." This invention describes a stage that consists of a base material with a step portion and an insulating film. The step portion has a first surface recessed from the top surface of the base material and a second surface recessed from the side surface. The insulating film comprises multiple layers that are alternately stacked, optimizing the performance of the stage in various applications.
Career Highlights
Naoya Kida is currently employed at Nhk Spring Co., Ltd., where he continues to develop innovative solutions in his field. His work has garnered attention for its practical applications and technical advancements.
Collaborations
Kida has collaborated with notable colleagues, including Jun Futakuchiya and Toshihiro Tachikawa. These partnerships have contributed to the development of cutting-edge technologies and have fostered a collaborative environment for innovation.
Conclusion
Naoya Kida's contributions to substrate temperature control through his patents demonstrate his expertise and commitment to innovation. His work at Nhk Spring Co., Ltd. and collaborations with fellow inventors highlight the importance of teamwork in advancing technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.