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Yokohama, Japan

Naoto Nakashima

USPTO Granted Patents = 8

Average Co-Inventor Count = 3.5

ph-index = 5

Forward Citations = 125(Granted Patents)

Location History:

Yokohama, JP (1987 - 1989)
Kurita, JP (1991)
Shiga, JP (1991)

Company Filing History:

8 out of 42,535

Years Active: 1987-1991

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8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 5008702 - Exposure method and apparatus (1991-04-16),

2. 4993837 - Method and apparatus for pattern detection (1991-02-19),

3. 4862008 - Method and apparatus for optical alignment of semiconductor by using a (1989-08-29),

4. 4819033 - Illumination apparatus for exposure (1989-04-04),

5. 4779986 - Reduction projection system alignment method and apparatus (1988-10-25),

6. 4744666 - Alignment detection optical system of projection type aligner (1988-05-17),

7. 4701050 - Semiconductor exposure apparatus and alignment method therefor (1987-10-20),

8. 4668089 - Exposure apparatus and method of aligning exposure mask with workpiece (1987-05-26),

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