Toyama, Japan

Naoto Nakamura

USPTO Granted Patents = 3 

Average Co-Inventor Count = 3.5

ph-index = 2

Forward Citations = 513(Granted Patents)


Company Filing History:


Years Active: 2010-2012

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3 patents (USPTO):Explore Patents

Title: Naoto Nakamura: Innovator in Semiconductor Technology

Introduction

Naoto Nakamura is a prominent inventor based in Toyama, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His innovative work has paved the way for advancements in semiconductor device production and processing.

Latest Patents

Nakamura's latest patents include a semiconductor device producing method, a substrate producing method, and a substrate processing apparatus. The semiconductor device producing method involves loading a substrate into a reaction tube and oxidizing it under atmospheric pressure by supplying various gases that react with each other, along with an inert gas. This method ensures that the flow rate of the inert gas is adjusted according to atmospheric pressure variations, maintaining constant partial pressures of the oxidizing gases.

The substrate processing apparatus is designed to prevent slips caused by damage from projections and adhesive forces due to excessive smoothing. It features a processing chamber for heat treating wafers and a specialized boat that supports the wafers. The design of the wafer holder minimizes displacement and prevents slips, ensuring optimal performance during the heat treatment process.

Career Highlights

Nakamura is currently employed at Hitachi Kokusai Electric Inc., where he continues to innovate in semiconductor technology. His work has been instrumental in enhancing the efficiency and reliability of semiconductor devices.

Collaborations

Throughout his career, Nakamura has collaborated with notable colleagues, including Iwao Nakamura and Sadao Nakashima. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.

Conclusion

Naoto Nakamura's contributions to semiconductor technology through his patents and work at Hitachi Kokusai Electric Inc. highlight his role as a key innovator in the field. His advancements continue to influence the industry and pave the way for future innovations.

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