Company Filing History:
Years Active: 2011
Title: Naoto Aida: Innovator in Semiconductor Manufacturing
Introduction
Naoto Aida is a prominent inventor based in Hitachinaka, Japan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent that addresses challenges in the production of integrated circuit devices. His work is vital in advancing technology in this critical industry.
Latest Patents
Naoto Aida holds a patent for a "Method for manufacturing a semiconductor integrated circuit device." This invention focuses on the challenges associated with the resist film after high-concentration ion implantation. The patent describes a process where the resist film develops a hard modified layer that is difficult to remove at lower temperatures. Aida's method involves increasing the temperature to approximately 250 degrees centigrade for an ashing treatment in a vacuum, which enhances the etching rate of the modified layer. This innovative approach addresses the popping phenomenon that occurs during the process, ensuring a more efficient removal of the resist hardened by ion implantation.
Career Highlights
Aida's career is marked by his dedication to semiconductor technology and his role at Renesas Electronics Corporation. His expertise in the field has led to advancements that benefit the manufacturing processes of integrated circuits. His innovative thinking and problem-solving skills have made him a valuable asset to his company and the industry as a whole.
Collaborations
Naoto Aida has collaborated with notable colleagues, including Katsuhisa Shibuya and Hiromichi Waki. These partnerships have fostered an environment of innovation and have contributed to the development of cutting-edge technologies in semiconductor manufacturing.
Conclusion
Naoto Aida's contributions to semiconductor manufacturing through his innovative patent demonstrate his commitment to advancing technology in this field. His work not only addresses existing challenges but also paves the way for future developments in integrated circuit devices.