This inventor holds 2 USPTO granted patents. Top assignee: Lam Research Corporation. Active years: 2001-2002.
Company Filing History:
Years Active: 2001-2002
Title: The Innovative Contributions of Nancy Tran
Introduction
Nancy Tran is a prominent inventor based in San Jose, CA. She has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase her expertise and innovative spirit. Her work primarily focuses on methods for etching and processing materials used in semiconductor devices.
Latest Patents
Nancy's latest patents include a method and apparatus for side wall passivation for organic etch. This robust method involves etching an organic low-k insulating layer on a semiconductor device by introducing a substrate with an organic insulating layer and an overlying mask layer. A plasma is developed within the processing chamber from an oxidizing gas and a passivation gas, which is either silicon or boron containing, or both. The plasma is then utilized to etch the organic insulating layer through the mask layer, resulting in a via with essentially vertical sidewalls.
Another notable patent addresses methods of preventing post-etch corrosion of an aluminum neodymium-containing layer. This method involves processing a substrate with an aluminum neodymium-containing layer that has residual chlorine near its etch surface. The process includes providing a gas chemistry that forms a plasma to passivate the etch surface, replacing residual chlorine with fluorine ions. This innovative approach enhances the reliability of semiconductor devices.
Career Highlights
Nancy Tran is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. Her work at Lam Research has allowed her to develop cutting-edge technologies that contribute to advancements in semiconductor manufacturing.
Collaborations
Throughout her career, Nancy has collaborated with notable colleagues, including Tuqiang Q Ni and Thomas S Choi. These collaborations have fostered an environment of innovation and have led to the development of impactful technologies in the semiconductor field.
Conclusion
Nancy Tran's contributions to semiconductor technology through her patents and work at Lam Research Corporation highlight her role as a leading inventor in the industry. Her innovative methods for etching and processing materials continue to influence advancements in semiconductor manufacturing.