Munkwon Kang

Title: Munkwon Kang: Innovator in Semiconductor Manufacturing

Introduction

Munkwon Kang is a notable inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor manufacturing, showcasing his expertise through innovative patent developments.

Latest Patents

Munkwon Kang holds a patent for a "Method of manufacturing semiconductor devices." This patent describes a process where a substrate with an insulating layer, which includes an oxide, is loaded into a chamber. The method involves removing at least a part of the insulating layer by injecting a process gas that includes an etching source gas into the chamber. The removal process is executed in a pulse type, alternating between a first period and a second period multiple times. During the first period, the etching source gas is supplied at a first flow rate, while in the second period, it is supplied at a lower flow rate. Notably, the temperature inside the chamber is maintained at 100°C or more throughout the removal process. Munkwon Kang has 1 patent to his name.

Career Highlights

Munkwon Kang is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has allowed him to be at the forefront of semiconductor technology, contributing to advancements that are crucial for modern electronics.

Collaborations

Munkwon Kang has collaborated with talented coworkers, including Mongsup Lee and Yoonho Son. Their combined efforts in research and development have further enhanced the innovative capabilities within their field.

Conclusion

Munkwon Kang's contributions to semiconductor manufacturing through his patented methods highlight his role as an influential inventor. His work continues to impact the electronics industry significantly.