Mukhopadhyay Madhusudan

Title: Innovations by Mukhopadhyay Madhusudan in Semiconductor Polishing Technology.

Introduction

Mukhopadhyay Madhusudan is a notable inventor based in Singapore, recognized for his contributions to semiconductor technology. He holds a patent that showcases his innovative approach to improving substrate uniformity through a unique polishing apparatus.

Latest Patents

Madhusudan's patent, titled "Linear polishing for improving substrate uniformity," introduces a linear polishing apparatus designed for semiconductor substrates. This invention features a novel polishing belt arrangement consisting of at least two polishing belts that form a continuous loop. Each belt is equipped with an outside polishing surface and an inside smooth surface. The belts are strategically spaced alongside each other, sharing a common axis at each end. They loop around a pair of rollers, which include a driver roller at one end and a driven roller at the other. A platen member is interposed between each belt and placed between the pairs of rollers, providing a polishing plane and supporting surface for the polishing belts. The polishing plane is designed with a plurality of holes that communicate with an elongated plenum chamber underneath, which supplies compressed gas to create upward pressure against the polishing belts. The driver rollers are connected to separate motors, allowing for independent control of the polishing belts.

Career Highlights

Madhusudan is currently employed at Chartered Semiconductor Manufacturing Ltd, where he applies his expertise in semiconductor manufacturing processes. His work has significantly contributed to advancements in the field, particularly in enhancing the efficiency and effectiveness of substrate polishing techniques.

Collaborations

Madhusudan has collaborated with notable colleagues, including Subramanian Balakumar and Chen Feng, who have contributed to his innovative projects and research endeavors.

Conclusion

Mukhopadhyay Madhusudan's innovative work in semiconductor polishing technology exemplifies the impact of creativity and engineering in advancing manufacturing processes. His patent reflects a significant step forward in improving substrate uniformity, showcasing his dedication to innovation in the semiconductor industry.