Mugurel Stancu

Title: Mugurel Stancu: Innovator in Integrated MEMS-CMOS Devices

Introduction

Mugurel Stancu is a notable inventor based in San Jose, California. He has made significant contributions to the field of micro-electromechanical systems (MEMS) and complementary metal-oxide-semiconductor (CMOS) technology. With a total of two patents to his name, Stancu's work focuses on enhancing the integration of MEMS and CMOS devices.

Latest Patents

Stancu's latest patents revolve around methods and structures for integrated MEMS-CMOS devices. One of his key inventions details a method for fabricating an integrated MEMS-CMOS device using a micro-fabrication process. This process allows for the realization of moving mechanical structures (MEMS) on top of a conventional CMOS structure. The method involves bonding a mechanical structural wafer on top of the CMOS and etching the mechanical layer using plasma etching processes, such as Deep Reactive Ion Etching (DRIE). During this etching process, CMOS devices that are directly connected to the mechanical layer can be exposed to plasma, which may cause permanent damage known as Plasma Induced Damage (PID). Stancu's invention presents methods and structures to prevent or reduce PID, thereby protecting the underlying CMOS circuits by grounding and providing an alternate path for the CMOS circuits until the MEMS layer is completely etched.

Career Highlights

Mugurel Stancu is currently employed at Mcube, Inc., where he continues to innovate in the field of MEMS and CMOS integration. His work has been instrumental in advancing the technology and applications of integrated devices.

Collaborations

Stancu has collaborated with notable colleagues, including Sudheer S Sridharamurthy and Te-Hse Terrence Lee, contributing to a dynamic and innovative work environment.

Conclusion

Mugurel Stancu's contributions to the field of integrated MEMS-CMOS devices highlight his role as a leading inventor in this technology. His innovative methods and structures are paving the way for advancements in micro-fabrication processes.