Mu-Kyeom Mun

Title: Mu-Kyeom Mun: Innovator in Substrate Processing Technology

Introduction

Mu-Kyeom Mun is a notable inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of substrate processing technology. His innovative work has led to the development of a unique apparatus that enhances the efficiency of substrate treatment.

Latest Patents

Mu-Kyeom Mun holds a patent for a "Faraday shield and apparatus for treating substrate." This inventive concept relates to an apparatus designed for processing a substrate. The apparatus includes a plasma chamber, a coil electrode installed around the plasma chamber, and a Faraday shield positioned between the coil electrode and the plasma chamber. The Faraday shield features a cutout with multiple slots formed vertically along the periphery of the plasma chamber. Additionally, it has an upper rim at the top of the cutout and a lower rim at the bottom. Both rims are equipped with a thermal expansion reduction means, which is designed to minimize the difference in thermal deformation between the upper and lower rims and the cutout. This innovative design aims to improve the overall performance of substrate processing.

Career Highlights

Mu-Kyeom Mun is currently associated with Psk Inc., where he continues to work on advancing substrate processing technologies. His expertise and innovative mindset have positioned him as a valuable asset in the field.

Collaborations

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Conclusion

Mu-Kyeom Mun's contributions to substrate processing technology through his innovative patent demonstrate his commitment to advancing the field. His work continues to influence the industry and pave the way for future innovations.