Minseung Song

Title: Minseung Song - Innovator in Semiconductor Manufacturing

Introduction

Minseung Song is an inventor based in Suwon-si, South Korea. He is known for his contributions to the field of semiconductor manufacturing, particularly in the development of methods for creating extreme ultraviolet (EUV) masks. Although he currently holds no granted patents, his innovative ideas are reflected in his patent applications.

Latest Patent Applications

One of Minseung Song's notable patent applications is titled "METHOD OF MANUFACTURING EXTREME ULTRAVIOLET (EUV) MASK FOR FORMING SEMICONDUCTOR MEMORY DEVICE." This application outlines a method that includes several key steps. The process begins with preparing a preliminary layout and forming a plurality of preliminary target patterns using a variety of preliminary spacer patterns derived from the preliminary layout. The next step involves evaluating the presence or absence of any abnormal target patterns among these preliminary target patterns. If any abnormal patterns are detected, the layout is modified to create a new configuration for forming a plurality of spacer patterns. Finally, an extreme ultraviolet mask is manufactured using this modified layout to produce a plurality of target patterns with the spacer patterns, where the preliminary spacer patterns extend in one direction.

Conclusion

Minseung Song's work in semiconductor manufacturing showcases his innovative approach to developing advanced technologies. His patent application reflects a significant contribution to the field, even in the absence of granted patents.