Company Filing History:
Years Active: 1996
Title: The Innovations of Ming-Yie Ling
Introduction
Ming-Yie Ling is a notable inventor based in Sunnyvale, California. He has made significant contributions to the field of particle scanning systems and automatic inspection systems. His innovative work has led to the development of a unique patent that enhances the efficiency of substrate inspection.
Latest Patents
Ming-Yie Ling holds a patent for an "Electron beam inspection system and method." This invention discloses numerous embodiments of a method and apparatus for a particle scanning system. In this system, a particle beam is directed at the surface of a substrate for scanning purposes. The invention includes a selection of detectors to detect secondary particles, back-scattered particles, and transmitted particles from the substrate. The substrate is mounted on an x-y stage, providing it with at least one degree of freedom during scanning. Additionally, the substrate is subjected to an electric field on its surface to accelerate the secondary particles. The system is designed to accurately measure the position of the substrate concerning the charged particle beam. Furthermore, it features an optical alignment means for initially aligning the substrate beneath the particle beam. To function efficiently, the system incorporates a vacuum means for evacuating and repressurizing a chamber containing the substrate.
Career Highlights
Ming-Yie Ling is currently employed at Kla Instruments Corporation, where he continues to innovate and develop advanced technologies. His work has been instrumental in improving inspection processes in various applications.
Collaborations
Ming-Yie Ling has collaborated with notable colleagues, including Dan Meisburger and Alan D Brodie. Their combined expertise has contributed to the success of various projects within the company.
Conclusion
Ming-Yie Ling's contributions to the field of particle scanning systems exemplify the spirit of innovation. His patent for the electron beam inspection system showcases his commitment to advancing technology in substrate inspection. His work continues to influence the industry positively.