Company Filing History:
Years Active: 2015
Title: Min-Chul Park: Innovator in Extreme Ultraviolet Spectrometer Calibration
Introduction
Min-Chul Park is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of extreme ultraviolet (EUV) technology. His work focuses on the calibration of EUV spectrometers, which are essential for various applications in advanced manufacturing and research.
Latest Patents
Min-Chul Park holds a patent for an "Apparatus and method for extreme ultraviolet spectrometer calibration." This invention discloses an apparatus that includes an EUV generating module, an Al filter, a diffraction grating, a CCD camera, a spectrum conversion module, and a control module. The control module compares a wavelength value corresponding to a maximum peak among peaks of the spectrum with a predetermined reference wavelength value. This process allows for the accurate measurement of the wavelength of a spectrum of EUV light, which is crucial for EUV exposure technology and mask inspection technology. He has 1 patent to his name.
Career Highlights
Min-Chul Park is affiliated with the Korea Institute of Science and Technology, where he conducts research and development in the field of EUV technology. His innovative work has positioned him as a key figure in advancing the capabilities of spectroscopic measurements.
Collaborations
Some of his notable coworkers include Sun Ho Kim and Yong Soo Kim. Their collaborative efforts contribute to the ongoing research and development in the field of EUV technology.
Conclusion
Min-Chul Park's contributions to extreme ultraviolet spectrometer calibration highlight his role as an innovator in the field. His patent and work at the Korea Institute of Science and Technology demonstrate his commitment to advancing technology in this critical area.