Korea Institute of Science and Technology

Min-Chul Park

Joon Kui Ahn

Seok Pil Lee

Jae Hun Kim

Yong Soo Kim

Sun Ho Kim

Young Min Jhon

Deok Ha Woo

Young Tae Byun

Min Ah Seo

Taik Jin Lee

Disclosed are herein an apparatus and method for extreme ultraviolet (EUV) spectroscope calibration. The apparatus for EUV spectroscope calibration includes an EUV generating module, an Al filter, a diffraction grating, a CCD camera, a spectrum conversion module, and a control module that compares a wavelength value corresponding to a maximum peak among peaks of the spectrum depending on the order of the EUV light converted from the spectrum conversion module with a predetermined reference wavelength value depending on an order of high-order harmonics to calculate a difference value with the closest reference wavelength value, and controls the spectrum depending on the order of the EUV light converted from the spectrum conversion module to be moved in a direction of wavelength axis by the calculated difference value. Thus, it is possible to accurately measure a wavelength of a spectrum of EUV light used in EUV exposure technology and mask inspection technology.

Apparatus and method for extreme ultraviolet spectrometer calibration

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Seoul, South Korea

Min-Chul Park