Mike Brenner

Title: Mike Brenner: Innovator in Micromechanical Device Fabrication

Introduction

Mike Brenner is a notable inventor based in Dallas, TX (US). He has made significant contributions to the field of micromechanical devices, holding a total of 2 patents. His innovative methods have improved the fabrication processes of these devices, enhancing their yield and performance.

Latest Patents

Brenner's latest patents include a "Method of reducing wafer particles after partial saw using a superhard" and a "Method of reducing wafer particles after partial saw." The first patent describes a method for fabricating a monolithic device from a wafer by selecting the composition of multiple layers of photoresist. This invention utilizes a superhard protective layer, such as DLC or TiW, to minimize defects in the underlying photoresist layers. The method allows for the use of a wet chemical HF acid to effectively etch away particles and damage at the oxide edges, significantly improving the yield of micromechanical devices. The second patent focuses on choosing compatible photoresist layers to prevent defects that could lead to damage during the etching process. This method also employs a strong hydrofluoric acid solution to remove debris and damaged portions of the underlying CMOS layer, further enhancing device yield.

Career Highlights

Mike Brenner is currently employed at Texas Instruments Corporation, where he continues to innovate in the field of micromechanical devices. His work has been instrumental in advancing the technology used in this area, making him a valuable asset to his company.

Collaborations

Brenner has collaborated with notable coworkers, including Timothy J Hogan and Lawrence D Dyer. Their combined expertise has contributed to the successful development of innovative solutions in micromechanical device fabrication.

Conclusion

Mike Brenner's contributions to the field of micromechanical devices through his patents and work at Texas Instruments Corporation highlight his role as a key innovator. His methods have significantly improved fabrication processes, leading to better yields and performance in micromechanical devices.