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For the Inventor, By the Inventor

Tokyo, Japan

Michio Kohno

This inventor holds 32 USPTO granted patents, primarily in Optical Inspection Systems. Top assignee: Canon Kabushiki Kaisha. Active years: 1987-2007.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Michio Kohno. Retrieved from https://idiyas.com/inventor/michio-kohno

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 32

% Patents Active = 84.4

Average Co-Inventor Count = 1.4

ph-index = 18

Forward Citations = 602(Granted Patents)


Location History:

  • Kawasaki, JP (1989)
  • Tokyo, JP (1987 - 1999)
  • Utsunomiya, JP (1996 - 2005)
  • Tochigi, JP (2004 - 2007)

Company Filing History:

goldMedal32 out of 92,994 
 
Canon Kabushiki Kaisha
 patents

Years Active: 1987-2007

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Areas of Expertise:
Illumination Optical System
Exposure Apparatus
Surface Inspection
Optical Scanning
Device Manufacturing
Surface Condition
Foreign Particle Inspection
Reticle Inspection
Projection Optical System
Detection Sensitivity
Scanning Optical System
32 patents (USPTO):Explore Patents
1. 7292316 - Illumination optical system and exposure apparatus having the same (2007-11-06),
2. 7079220 - Illumination optical system and method, and exposure apparatus (2006-07-18),
3. 6999157 - Illumination optical system and method, and exposure apparatus (2006-02-14),
4. 6857764 - Illumination optical system and exposure apparatus having the same (2005-02-22),
5. 6833905 - Illumination apparatus, projection exposure apparatus, and device fabricating method (2004-12-21),
6. 6621061 - Exposure method and device manufacturing method using the same (2003-09-16),
7. 6603530 - Exposure apparatus that illuminates a mark and causes light from the mark to be incident on a projection optical system (2003-08-05),
8. 5963316 - Method and apparatus for inspecting a surface state (1999-10-05),
9. 5774575 - Inspection apparatus, and exposure apparatus and device manufacturing (1998-06-30),
10. 5652657 - Inspection system for original with pellicle (1997-07-29),
11. 5602639 - Surface-condition inspection method and apparatus including a plurality (1997-02-11),
12. 5591985 - Surface state inspecting system including a scanning optical system for (1997-01-07),
13. 5585916 - Surface inspecting device (1996-12-17),
14. 5581348 - Surface inspecting device using bisected multi-mode laser beam and (1996-12-03),
15. 5581089 - Apparatus and method for inspecting a reticle for color centers (1996-12-03),

Title: The Innovative Contributions of Michio Kohno in Optical Systems

Introduction

Michio Kohno, based in Tokyo, Japan, is a renowned inventor with a significant contribution to the field of optical systems. With a remarkable portfolio of 32 patents, he is recognized for his innovative approaches to illumination optical systems that enhance imaging technologies. Kohno's expertise has made a lasting impact within the electronics and imaging industries.

Latest Patents

Among his latest patents, Kohno has developed an "Illumination Optical System and Exposure Apparatus Having the Same." This invention features an illumination optical system designed for Koehler-illuminating a target surface, utilizing a light integrator that forms a secondary light source through multiple elements directly applied onto a substrate. The system includes a condenser that condenses light from the light integrator, along with a shield that prevents direct light from interfering with effective illumination on the target surface.

Another recent patent is the "Illumination Optical System and Method, and Exposure Apparatus." This innovative system focuses on illuminating a reticle using light from a source. It incorporates an illumination-light generating mechanism capable of creating a light amount distribution on a plane in a manner that exhibits a Fourier conversion relationship with the reticle. The unique design allows Kohno to manipulate the light amount or area between distinct sections, enabling precise pattern resolution on the reticle.

Career Highlights

Kohno's career has been marked by his dedication to advancing optical technology. He is currently employed at Canon Kabushiki Kaisha, one of the leading companies in imaging technology and optical solutions. His continuous work in this sector reflects his commitment to innovation and excellence in product development.

Collaborations

Throughout his career, Kohno has collaborated with talented individuals, including his colleagues Akiyoshi Suzuki and Seiya Miura. These partnerships have fostered an environment of creativity and ingenuity, contributing to the development of pioneering optical systems.

Conclusion

In summary, Michio Kohno is an influential inventor whose work has significantly shaped the field of optical systems. His latest patents exemplify his innovative mindset and technical expertise. With an impressive roster of patents and collaborations, Kohno continues to pave the way for advancements in illumination technology, further solidifying his role as a key player in the industry.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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