Location History:
- Shizuoka, JP (2011)
- Kanagawa, JP (2014)
Company Filing History:
Years Active: 2011-2014
Title: Michihiro Sakai: Innovator in Charged Particle Beam Technology
Introduction
Michihiro Sakai is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of charged particle beam technology, holding two patents that showcase his innovative approach to solving complex engineering challenges.
Latest Patents
Sakai's latest patents include a "Settling Time Acquisition Method" and a "Charged Particle Beam Writing Apparatus and Optical Axis Deviation Correcting Method for Charged Particle Beam." The settling time acquisition method involves writing reference patterns using a charged particle beam and measuring the width sizes of both reference and evaluation patterns to acquire settling times for a DAC amplifier. The charged particle beam writing apparatus features a stage for target objects, an emitting unit for the charged particle beam, and a deflector to correct optical axis deviations, ensuring precision in the writing process.
Career Highlights
Sakai is currently employed at Nuflare Technology, Inc., where he continues to develop advanced technologies in the field of charged particle beams. His work has been instrumental in enhancing the capabilities of charged particle beam writing systems, which are crucial for various applications in semiconductor manufacturing and nanotechnology.
Collaborations
Sakai collaborates with notable colleagues, including Rieko Nishimura and Ryoichi Kakehi. Their combined expertise contributes to the innovative projects at Nuflare Technology, Inc., fostering a collaborative environment that drives technological advancements.
Conclusion
Michihiro Sakai's contributions to charged particle beam technology through his patents and work at Nuflare Technology, Inc. highlight his role as a key innovator in the field. His dedication to advancing technology continues to impact the industry positively.