Michele Stawacz

Title: Michele Stawacz: Innovator in Semiconductor Processing Technology

Introduction

Michele Stawacz is a prominent inventor based in New Milford, CT (US). She has made significant contributions to the field of semiconductor processing through her innovative work. With a focus on detecting fluorine-containing species, her inventions have the potential to enhance the efficiency and safety of semiconductor manufacturing processes.

Latest Patents

Michele holds a patent for an "Apparatus and process for sensing fluoro species in semiconductor processing systems." This invention involves a gas detector designed to identify fluorine-containing species in gases, particularly in the effluent of semiconductor processing tools undergoing etch cleaning. The detector utilizes a microelectromechanical system (MEMS)-based device structure and features a free-standing metal element that serves as both a sensing component and a heat source when elevated temperature sensing is necessary.

Career Highlights

Michele is currently employed at Advanced Technology Materials, Inc., where she continues to develop innovative solutions for the semiconductor industry. Her work has been instrumental in advancing the technology used in gas detection and semiconductor processing.

Collaborations

Michele collaborates with talented professionals in her field, including Frank DiMeo, Jr. and Philip S. H. Chen. These partnerships enhance her research and development efforts, contributing to the success of her projects.

Conclusion

Michele Stawacz is a trailblazer in the semiconductor processing industry, with her patent and ongoing work reflecting her commitment to innovation. Her contributions are vital to improving the safety and efficiency of semiconductor manufacturing processes.