Fremont, CA, United States of America

Michael T Sherwood


Average Co-Inventor Count = 3.2

ph-index = 7

Forward Citations = 403(Granted Patents)


Location History:

  • Fremont, CA (US) (1997 - 2006)
  • Agoura, CA (US) (2013)

Company Filing History:


Years Active: 1997-2013

where 'Filed Patents' based on already Granted Patents

10 patents (USPTO):

Title: Michael T. Sherwood: Innovator in Wafer Polishing Technology

Introduction

Michael T. Sherwood is a prominent inventor based in Fremont, CA, known for his significant contributions to the field of wafer polishing technology. With a total of 10 patents to his name, Sherwood has developed innovative solutions that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

Among his latest patents is the "Chemical Mechanical Polishing Retaining Ring," which features a unique design that maintains a substrate beneath the mounting surface during polishing. This retaining ring consists of a lower portion made of plastic and an upper portion made of metal, ensuring optimal performance during the polishing process. Another notable patent is the "Fluid-Pressure Regulated Wafer Polishing Head," which utilizes a wafer backing member to provide a uniform force distribution across the wafer. This technology allows for consistent polishing without variations in the wafer material, significantly improving the quality of the final product.

Career Highlights

Michael T. Sherwood has made a remarkable impact in the semiconductor industry through his work at Applied Materials, Inc. His innovative designs and patents have played a crucial role in advancing wafer polishing techniques, making him a key figure in the field.

Collaborations

Throughout his career, Sherwood has collaborated with notable colleagues, including Harry Q. Lee and Norman Shendon. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies in wafer processing.

Conclusion

Michael T. Sherwood's contributions to wafer polishing technology exemplify his dedication to innovation and excellence in the semiconductor industry. His patents continue to influence the field, showcasing the importance of inventive thinking in advancing technology.

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