Michael Stetter

Title: The Innovations of Inventor Michael Stetter

Introduction

Michael Stetter, an accomplished inventor based in Munich, Germany, has made significant contributions to the field of semiconductor technologies. With a portfolio that includes six patents, he is recognized for his innovative approaches in reducing shear stress in copper via's used in microprocessors and random access memory cells.

Latest Patents

One of Stetter's prominent patents focuses on the "Reduction of the shear stress in copper via's in organic interlayer dielectric material." This invention outlines a method for forming interconnect layers on semiconductor bodies that effectively reduces the occurrence of shorts between adjacent conductors and vias, particularly in technologies with feature sizes of 0.18 microns or smaller. His innovative approach involves etching techniques that create recessed copper top surfaces following a chemical-mechanical polishing process. Stetter further enhances the performance by controlling the thickness of an applied barrier layer to ensure it is co-planar with the surrounding insulator surfaces, which eliminates the need for a capping layer. This advancement leads to reduced capacitive coupling, stress, and overall cost.

Another significant patent is related to a "Robust via structure and method." This method involves forming a conductive line in a first insulating layer, with an additional insulating layer placed over it. The design of the via, which extends through both layers, ensures enhanced contact and structural integrity by incorporating a locking region that improves the connection to the conductive line.

Career Highlights

Throughout his career, Stetter has worked with notable companies, including Infineon Technologies AG, where he applied his expertise to advance semiconductor technology and innovation. His work remains pivotal in shaping the landscape of modern electronics.

Collaborations

Michael Stetter has collaborated with esteemed colleagues such as Andy Cowley and Erdem Kaltalioglu. These partnerships have allowed for a richer exchange of ideas and have driven the development of cutting-edge technologies in their respective fields.

Conclusion

In summary, Michael Stetter stands out as a remarkable inventor with a strong emphasis on improving semiconductor technology through innovative solutions. His six patents reflect a commitment to excellence and a desire to push the boundaries of what is achievable in electronics. As technology continues to evolve, the contributions of inventors like Stetter remain crucial to future advancements.